Size and Dimensions

footprint; height

30x30; 12mm

max installation space

36x30; 12mm

weight

g

Materials

positioner body

Titanium

actuator

PZT ceramics

connecting wires

insulated twisted pair, copper

Options

environmental options

/RT

Load (@ ambient conditions)

maximum load

20 N

maximum dynamic force along the axis

2 N

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Coarse Positioning Mode

travel range (step mode)

6 mm

maximum drive velocity @ 300 K

approx. 3 mm/s

Fine Positioning Mode

fine positioning resolution

sub-nm

fine linear positioning range @ 300 K

5 µm

fine linear positioning range @ 4 K

0.8 µm

Accuracy of Movement

repeatability of step sizes

typically 5 % over full range

typ. forward / backward step asymmetry

typically 5 %