Size and Dimensions

footprint; height

34x30; 12mm

max installation space

34x36; 12mm

weight

44 g

Materials

positioner body

titanium

actuator

PZT ceramics

connecting wires

insulated twisted pair, copper

Options

environmental options

/HV, /LT, /LT/HV, /LT/UHV, /RT, /UHV

Compatibility with Electronics

ANC350 piezo positioning controller

ANC350/RES

Load (@ ambient conditions)

maximum load

20 N

maximum dynamic force along the axis

2 N

Coarse Positioning Mode

travel range (step mode)

6 mm

maximum drive velocity @ 300 K

approx. 3 mm/s

Fine Positioning Mode

fine positioning resolution

sub-nm

fine positioning range @ 300 K

0 - 7.5 µm

fine positioning range @ 4 K

0 - 1.2 µm

Accuracy of Movement

repeatability of step sizes

typically 5 % over full range

typ. forward / backward step asymmetry

typically 5 %

Position Encoder

readout mechanism

resistive sensor

sensor resolution

approx. 200 nm

repeatability

1..2 µm