Technology

travel mechanism

inertial piezo drive

positioner type

linear

Size and Dimensions

footprint; height

30 x 80 ; 9.5 mm

max installation space

30 x 131.6 ; 9.5 mm

weight (aluminium version)

78 g

weight (stainless steel version)

147 g

Materials

positioner body

Aluminum

actuator

PZT ceramics

connecting wires

copper, jacket: RT: silicon, HV/UHV: fiberglass

bearings

stainless steel

Load (@ ambient conditions)

maximum load

240 N

maximum dynamic force along the axis

1 N

Coarse Positioning Mode

input voltage range

0 - 60 V

travel range (step mode)

50 mm

maximum drive velocity @ 300 K

4.5 mm/s

typical minimum step size @ 300 K

50 nm

Fine Positioning Mode

fine positioning resolution

sub-nm

fine linear positioning range @ 300 K

1.6 ┬Ám

input DC voltage range @ 300 K

0 - 60 V

Accuracy of Movement

repeatability of step sizes

typically 5 % over full range

typ. forward / backward step asymmetry

0.1

Working Conditions

mounting orientation

arbitrary

Connectors and Feedthroughs

cable

50 cm cable with connector

connector type

14-pole connector

High Load Option (/HL)

/HL/RT - maximum dynamic force

5 N

Options

material options

/StSt, /Al

high load option

/HL

environmental options

/RT, /HV, /UHV

Versions

/StSt/UHV Version

1005694

/StSt/HV Version

1005682

/Al/RT Version

1005657

/Al/HL/RT Version

1008839

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