Size and Dimensions

footprint; height

80x30; 9.5mm

max installation space

30x131.6; 9.5mm

weight (aluminium version)

78 g

weight (stainless steel version)

147 g

Materials

positioner body

aluminum

positioner body (/HV, /UHV)

stainless steel

actuator

PZT ceramics

connecting wires

copper, jacket: RT: silicon, HV/UHV: fiberglass

Options

environmental options

/RT, /HV, /UHV

Compatibility with Electronics

ECC100 piezo positioning controller

all versions

Load (@ ambient conditions)

maximum load

240 N

maximum dynamic force along the axis

1 N

Coarse Positioning Mode

travel range (step mode)

50 mm

maximum drive velocity @ 300 K

4.5 mm/s

Fine Positioning Mode

fine positioning resolution

sub-nm

fine positioning range @ 300 K

1.6 ┬Ám

Accuracy of Movement

repeatability of step sizes

typically 5 % over full range

typ. forward / backward step asymmetry

10 %

Position Encoder

readout mechanism

optoelectronic sensor

sensor resolution

1 nm

repeatability

50 nm