Size and Dimensions

footprint; height

80x30; 9.5mm

max installation space

30x131.6; 9.5mm

weight (aluminium version)

78 g

weight (stainless steel version)

147 g


positioner body


positioner body (/HV, /UHV)

stainless steel


PZT ceramics

connecting wires

copper, jacket: RT: silicon, HV/UHV: fiberglass


environmental options

/RT, /HV, /UHV

Compatibility with Electronics

ECC100 piezo positioning controller

all versions

Load (@ ambient conditions)

maximum load

240 N

maximum dynamic force along the axis

1 N

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Coarse Positioning Mode

travel range (step mode)

50 mm

maximum drive velocity @ 300 K

4.5 mm/s

Fine Positioning Mode

fine positioning resolution


fine positioning range @ 300 K

1.6 ┬Ám

Accuracy of Movement

repeatability of step sizes

typically 5 % over full range

typ. forward / backward step asymmetry

10 %

Position Encoder

readout mechanism

optoelectronic sensor

encoded travel range

sensor resolution

1 nm


50 nm